A Loop Control Configuration to set a Particular Plasma Power

An example of customer configuration of the SVR is given and demostrate the configuration capabilities due to providing an open firmware framework.

A loop control for achivement of a particular and constant plasma power has been implemented. The true plasma power is calulated from reflexion coefficient, available microwave power, and an implemented de-embedding algorithm. The SVR acts in standalone configuration with analog voltage input to determine the desired plasma power value and a switch to turn on/off the plasma and its loop algorithm. The measurement setup, the transient responses and a short video clip point out the benefit of open source software on sophisticated hardware.

Block Diagram of Measurement Setup
Plasma Ignition and Loop Response
Transient Response of Plasma Excitation Loop Control

The clip is a placeholder and will change very soon.